Solar cell and method of manufacturing the same

ABSTRACT

A solar cell includes a semiconductor substrate, a first semiconductor region positioned at a front surface or a back surface of the semiconductor substrate and doped with impurities of a first conductive type, a first electrode on the first semiconductor region, a second electrode on the back surface of the semiconductor substrate, and a second semiconductor region positioned between the semiconductor substrate and the second electrode and doped with impurities of a second conductive type opposite the first conductive type, wherein the second electrode is formed of a metal foil, and an air gap is formed between the second electrode formed of the metal foil and the back surface of the semiconductor substrate.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a Divisional Application of U.S. application Ser.No. 15/416,673 filed Jan. 26, 2017, which claims priority to, and thebenefit of, Korean Patent Application No. 10-2016-0010497 filed in theRepublic of Korea on Jan. 28, 2016. All of these applications areincorporated herein by reference for all purposes as if fully set forthherein.

BACKGROUND OF THE INVENTION Field of the Invention

Embodiments of the invention relate to a solar cell and a method ofmanufacturing the same.

Description of the Related Art

Recently, as existing energy sources such as petroleum and coal areexpected to be depleted, interests in alternative energy sources forreplacing the existing energy sources are increasing. Among thealternative energy sources, solar cells for generating electric energyfrom solar energy have been particularly spotlighted.

A solar cell generally includes semiconductor parts, which respectivelyhave different conductive types, for example, a p-type and an n-type andthus form a p-n junction, and electrodes respectively connected to thesemiconductor parts of the different conductive types.

When light is incident on the solar cell, a plurality of electron-holepairs are produced in the semiconductor parts and are separated intoelectrons and holes by the incident light. The electrons move to then-type semiconductor part, and the holes move to the p-typesemiconductor part. Then, the electrons and the holes are collected bythe different electrodes respectively connected to the n-typesemiconductor part and the p-type semiconductor part. The electrodes areconnected to each other using electric wires to thereby obtain electricpower.

SUMMARY OF THE INVENTION

Embodiments of the invention provide a solar cell and a method ofmanufacturing the same.

In one aspect, there is provided a solar cell including a semiconductorsubstrate, a first semiconductor region positioned at a front surface ora back surface of the semiconductor substrate and doped with impuritiesof a first conductive type, a first electrode connected to the firstsemiconductor region, and a second electrode connected to the backsurface of the semiconductor substrate, wherein the second electrode isformed of a metal foil, and an air gap is formed between the secondelectrode formed of the metal foil and the back surface of thesemiconductor substrate.

The second electrode formed of the metal foil may include a contactportion contacting the back surface of the semiconductor substrate, anda non-contact portion that is spaced apart from the back surface of thesemiconductor substrate to form the air gap between the second electrodeand the back surface of the semiconductor substrate.

In this instance, the contact portion of the second electrode formed ofthe metal foil may be in point contact or line contact with the backsurface of the semiconductor substrate.

The second electrode formed of the metal foil may be made of at leastone of Ag, Al, Au, W, Mo, Ni, Pt, Cu, Ti, Cr, and Fe, or an alloythereof.

A thickness of the non-contact portion of the second electrode formed ofthe metal foil may be 20 μm to 30 μm. Further, the contact portion ofthe second electrode formed of the metal foil may be further recessedtoward the semiconductor substrate than the non-contact portion.

The solar cell may further include a second semiconductor regionpositioned between the semiconductor substrate and the second electrodeformed of the metal foil and doped with impurities of a secondconductive type opposite the first conductive type. The contact portionof the second electrode formed of the metal foil may contact the secondsemiconductor region, and the non-contact portion of the secondelectrode formed of the metal foil may be spaced apart from the secondsemiconductor region to form the air gap.

An impurity doping concentration of a portion of the secondsemiconductor region contacting the contact portion may be higher thanan impurity doping concentration of a portion of the secondsemiconductor region not contacting the contact portion.

The solar cell may further include a metal electrode layer positionedbetween the second semiconductor region and the second electrode formedof the metal foil and entirely connected to the semiconductor substrate.The contact portion may contact the metal electrode layer, and thenon-contact portion may be spaced apart from the metal electrode layerto form the air gap.

The solar cell may further include a back passivation layer positionedbetween the second semiconductor region and the second electrode formedof the metal foil, and formed of a dielectric material. The contactportion may pass through the back passivation layer and contact thesecond semiconductor region. The non-contact portion may be spaced apartfrom the back passivation layer to form the air gap. In this instance, aconductive contact electrode passing through the back passivation layermay be further positioned between the contact portion and the secondsemiconductor region.

The semiconductor substrate may be formed of a crystalline siliconmaterial, and the second semiconductor region may be formed of anamorphous silicon material. A transparent electrode layer may bepositioned at a back surface of the second semiconductor region formedof the amorphous silicon material. The contact portion may contact thetransparent electrode layer, and the non-contact portion may be spacedapart from the transparent electrode layer to form the air gap.

A conductive contact electrode may be further positioned between thecontact portion and the transparent electrode layer.

In another aspect, there is provided a solar cell including asemiconductor substrate, a first semiconductor region positioned at aback surface of the semiconductor substrate and doped with impurities ofa first conductive type, a second semiconductor region positioned at theback surface of the semiconductor substrate and doped with impurities ofa second conductive type opposite the first conductive type, a firstelectrode connected to the first semiconductor region, and a secondelectrode connected to the second semiconductor region, wherein each ofthe first electrode and the second electrode is formed of a metal foilcovering the first semiconductor region and the second semiconductorregion, respectively, and an air gap is formed between the first andsecond electrodes formed of the metal foil and the first and secondsemiconductor regions.

The first electrode formed of the metal foil may include a first contactportion contacting a back surface of the first semiconductor region anda first non-contact portion that is spaced apart from the firstsemiconductor region to form the air gap between the first electrode andthe first semiconductor region. The second electrode formed of the metalfoil may include a second contact portion contacting a back surface ofthe second semiconductor region and a second non-contact portion that isspaced apart from the second semiconductor region to form the air gapbetween the second electrode and the second semiconductor region.

The first contact portion may be in point contact or line contact withthe back surface of the first semiconductor region, and the secondcontact portion may be in point contact or line contact with the backsurface of the second semiconductor region.

The first and second electrodes formed of the metal foil may be made ofat least one of Ag, Al, Au, W, Mo, Ni, Pt, Cu, Ti, Cr, and Fe, or analloy thereof.

A thickness of each of the first and second contact portions may be 20μm to 30 μm. Further, the first and second contact portions may befurther recessed toward the semiconductor substrate than the first andsecond non-contact portions, respectively.

In yet another aspect, there is provided a method of manufacturing asolar cell including preparing a semiconductor substrate including afirst semiconductor region doped with impurities of a first conductivetype at a front surface or a back surface of the semiconductorsubstrate; forming a first electrode connected to the firstsemiconductor region; and a second electrode forming operation includingforming a second electrode connected to the back surface of thesemiconductor substrate using a metal foil and at the same time formingan air gap between the metal foil and the back surface of thesemiconductor substrate.

The second electrode formed of the metal foil in the second electrodeforming operation may include a contact portion contacting the backsurface of the semiconductor substrate, and a non-contact portion thatis spaced apart from the back surface of the semiconductor substrate toform the air gap between the metal foil and the back surface of thesemiconductor substrate.

The semiconductor substrate may further include a second semiconductorregion positioned at the back surface of the semiconductor substrate anddoped with impurities of a second conductive type opposite the firstconductive type. The second electrode forming operation may includeforming the second electrode connected to the second semiconductorregion using the metal foil and at the same time forming the air gapbetween the metal foil and the second semiconductor region.

The contact portion of the second electrode formed of the metal foil maycontact the second semiconductor region formed at the back surface ofthe semiconductor substrate. The non-contact portion of the secondelectrode formed of the metal foil may be spaced apart from the secondsemiconductor region to form the air gap.

The second electrode forming operation may further include performing athermal process on the contact portion of an entire portion of the metalfoil to bring the contact portion into contact with the secondsemiconductor region.

The thermal process of the second electrode forming operation may beperformed using at least one of laser irradiation, infrared irradiation,hot air, or hot probe.

The thermal process of the second electrode forming operation may beperformed using laser irradiation, and an intensity of a laser may be ina range between 6 mJ/cm² and 500 mJ/cm².

The first semiconductor region may be extended in a first direction atthe back surface of the semiconductor substrate. The secondsemiconductor region may be spaced apart from the first semiconductorregion at the back surface of the semiconductor substrate and extendedin the first direction. The forming of the first electrode may includeforming the first electrode connected to the first semiconductor regionusing the metal foil and at the same time forming an air gap between themetal foil and the first semiconductor region.

The first electrode formed of the metal foil may include a first contactportion contacting a back surface of the first semiconductor region anda first non-contact portion that is spaced apart from the firstsemiconductor region to form the air gap between the metal foil and thefirst semiconductor region. The second electrode formed of the metalfoil may include a second contact portion contacting a back surface ofthe second semiconductor region and a second non-contact portion that isspaced apart from the second semiconductor region to form the air gapbetween the metal foil and the second semiconductor region.

A solar cell and a method of manufacturing the same according toembodiments of the invention can further improve a back reflectance of asemiconductor substrate by forming electrodes using a metal foil andforming an air gap between the metal foil and the semiconductorsubstrate, and can also reduce the manufacturing cost of the solar cellby simplifying a method of forming the electrodes.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are included to provide a furtherunderstanding of the invention and are incorporated in and constitute apart of this specification, illustrate embodiments of the invention andtogether with the description serve to explain the principles of theinvention. In the drawings:

FIG. 1 is a partial perspective view of a solar cell according to afirst embodiment of the invention;

FIG. 2 illustrates a back pattern of a solar cell according to a firstembodiment of the invention;

FIG. 3 is a cross-sectional view of a solar cell according to a firstembodiment of the invention;

FIG. 4 is a cross-sectional view of a solar cell according to a secondembodiment of the invention;

FIGS. 5A and 5B are cross-sectional views of a solar cell according to athird embodiment of the invention;

FIGS. 6A and 6B are cross-sectional views of a solar cell according to afourth embodiment of the invention;

FIGS. 7 to 9B illustrate a solar cell according to a fifth embodiment ofthe invention;

FIG. 10 illustrates an example of a cross-section of a solar cell moduleto which a solar cell according to an embodiment of the invention isapplied;

FIG. 11 is a flow chart illustrating a method of manufacturing a solarcell according to a first embodiment of the invention; and

FIG. 12 is a flow chart illustrating a method of manufacturing a solarcell according to a second embodiment of the invention.

DETAILED DESCRIPTION OF THE EMBODIMENTS

Reference will now be made in detail to embodiments of the invention,examples of which are illustrated in the accompanying drawings. Thisinvention may, however, be embodied in many different forms and shouldnot be construed as limited to the embodiments set forth herein.Wherever possible, the same reference numbers will be used throughoutthe drawings to refer to the same or like parts. It will be noted that adetailed description of known arts will be omitted if it is determinedthat the detailed description of the known arts can obscure theembodiments of the invention.

In the drawings, the thickness of layers, films, panels, regions, etc.,are exaggerated for clarity. It will be understood that when an elementsuch as a layer, film, region, or substrate is referred to as being “on”another element, it can be directly on the other element or interveningelements may also be present. In contrast, when an element is referredto as being “directly on” another element, there are no interveningelements present. Further, it will be understood that when an elementsuch as a layer, film, region, or substrate is referred to as being“entirely” on other element, it may be on the entire surface of theother element and may not be on a portion of an edge of the otherelement.

In the following description, “front surface” may be one surface of asemiconductor substrate, on which light is directly incident, and “backsurface” may be a surface opposite the one surface of the semiconductorsubstrate, on which light is not directly incident or reflective lightmay be incident.

In the following description, the fact that values (for example, lengthsor widths) of two different components are substantially equal to eachother means that the values are equal to each other within a margin oferror of 10% or less.

Embodiments of the invention will be described below with reference toFIGS. 1 to 12.

FIG. 1 is a partial perspective view of a solar cell according to afirst embodiment of the invention. FIG. 2 illustrates a back pattern ofthe solar cell according to the first embodiment of the invention. FIG.3 is a cross-sectional view of the solar cell according to the firstembodiment of the invention.

As shown in FIG. 1, a solar cell according to a first embodiment of theinvention may include a semiconductor substrate 110, a firstsemiconductor region 120, an anti-reflection layer 130, a plurality offirst electrodes 140, a second semiconductor region 170, and a secondelectrode 150.

In embodiments disclosed herein, the anti-reflection layer 130 and thesecond semiconductor region 170 may be omitted, if desired or necessary.However, when the solar cell includes them, efficiency of the solar cellmay be further improved. Thus, embodiments of the invention aredescribed using the solar cell including the anti-reflection layer 130and the second semiconductor region 170 as an example.

The semiconductor substrate 110 may be formed of a crystalline siliconmaterial of at least one of single crystal silicon and polycrystallinesilicon doped with impurities of a first conductive type or a secondconductive type. For example, the semiconductor substrate 110 may beformed of a single crystal silicon wafer.

In embodiments disclosed herein, the first conductive type or the secondconductive type of the semiconductor substrate 110 may be one of ann-type and a p-type.

When the semiconductor substrate 110 is of the p-type, the semiconductorsubstrate 110 may be doped with impurities of a group III element, suchas boron (B), gallium (Ga), and indium (In). Alternatively, when thesemiconductor substrate 110 is of the n-type, the semiconductorsubstrate 110 may be doped with impurities of a group V element, such asphosphorus (P), arsenic (As), and antimony (Sb).

In the following description, embodiments of the invention are describedusing an example where impurities contained in the semiconductorsubstrate 110 are impurities of the second conductive type and aren-type impurities. However, embodiments of the invention are not limitedthereto.

A front surface of the semiconductor substrate 110 may be an unevensurface having a plurality of uneven portions or having unevencharacteristics. Thus, the first semiconductor regions 121 positioned onthe front surface of the semiconductor substrate 110 may have an unevensurface.

Hence, an amount of light reflected from the front surface of thesemiconductor substrate 110 may decrease, and an amount of lightincident on the inside of the semiconductor substrate 110 may increase.

As shown in FIG. 1, the first semiconductor region 120 may be entirelyformed at an incident surface (i.e., the front surface) of thesemiconductor substrate 110. More specifically, the first semiconductorregion 120 may be formed by doping the front surface of thesemiconductor substrate 110 formed of the crystalline silicon materialwith impurities of the first conductive type.

When impurities of the second conductive type contained in thesemiconductor substrate 110 are of the n-type, doped impurities of thefirst conductive type used to form the first semiconductor region 120may be of the p-type. Hence, the semiconductor substrate 110 and thefirst semiconductor region 120 may form a p-n junction.

Light incident on the semiconductor substrate 110 may be separated intoelectrons and holes. The electrons may move to an n-type semiconductorpart, and the holes may move to a p-type semiconductor part. Thus, theseparated electrons may move to a back surface of the semiconductorsubstrate 110, and the separated holes may move to the firstsemiconductor region 120.

As described above, when the semiconductor substrate 110 is doped withimpurities of the second conductive type, and the first semiconductorregion 120 is doped with impurities of the first conductive typeopposite the second conductive type of the semiconductor substrate 110,the first semiconductor region 120 may serve as an emitter region.

The anti-reflection layer 130 may be positioned at the incident surfaceof the semiconductor substrate 110 and may be positioned on the firstsemiconductor region 120.

The anti-reflection layer 130 may be formed as a plurality of layersincluding at least one of aluminum oxide (AlOx), hydrogenated siliconnitride (SiNx:H), hydrogenated silicon oxide (SiOx:H), hydrogenatedsilicon oxynitride (SiNxOy:H), and hydrogenated amorphous silicon(a-Si:H).

The anti-reflection layer 130 thus formed may further strengthen apassivation function and thus may further improve photoelectricefficiency of the solar cell.

As shown in FIG. 1, the plurality of first electrodes 140 may bepositioned to be spaced apart from one another on the front surface ofthe semiconductor substrate 110. Each first electrode 140 may extend ina first direction x.

The plurality of first electrodes 140 may pass through theanti-reflection layer 130 and may be electrically connected to the firstsemiconductor region 120.

Hence, the plurality of first electrodes 140 may collect carriers movingto the first semiconductor region 120.

The second semiconductor region 170 may be positioned at the backsurface opposite the incident surface of the semiconductor substrate110. More specifically, the second semiconductor region 170 may beformed by doping the back surface of the semiconductor substrate 110formed of the crystalline silicon material with impurities of the secondconductive type.

When the semiconductor substrate 110 is doped with impurities of thesecond conductive type as described above, a doping concentration ofimpurities of the second conductive type used to form the secondsemiconductor region 170 may be higher than a doping concentration ofimpurities of the second conductive type contained in the semiconductorsubstrate 110. In this instance, the second semiconductor region 170 mayserve as a back surface field region.

Further, the second semiconductor region 170 serving as the back surfacefield region may be entirely formed at the back surface of thesemiconductor substrate 110. An impurity doping concentration of aportion of the second semiconductor region 170 connected to the secondelectrode 150 may be higher than an impurity doping concentration of aportion of the second semiconductor region 170 that is not connected tothe second electrode 150.

For example, when an impurity doping concentration of the secondconductive type of a portion 171 of the second semiconductor region 170,that is not connected to the second electrode 150, is n⁺, an impuritydoping concentration of the second conductive type of a portion 172 ofthe second semiconductor region 170 connected to the second electrode150 may be n⁺⁺.

A potential barrier is formed by a difference in an impurity dopingconcentration between the semiconductor substrate 110 and the secondsemiconductor region 170. Hence, the potential barrier can prevent orreduce holes from moving to the second semiconductor region 170 used asa moving path of electrons and can make it easier for electrons to moveto the second semiconductor region 170.

As a result, the embodiment of the invention can reduce an amount ofcarriers lost by a recombination and/or a disappearance of electrons andholes at and around the back surface of the semiconductor substrate 110and can accelerates a movement of desired carriers toward the secondelectrode 150, thereby increasing an amount of carriers moving to thesecond electrode 150.

The second electrode 150 may be electrically connected to the backsurface of the semiconductor substrate 110 and may collect carriersmoving to the second semiconductor region 170.

The second electrode 150 may contact the second semiconductor region 170having the impurity doping concentration higher than the semiconductorsubstrate 110, and thus transfer efficiency of carriers from thesemiconductor substrate 110 to the second electrode 150 may be improved.

Wires may be connected to the first and second electrodes 140 and 150 ofthe solar cell according to the embodiment of the invention, and aplurality of solar cells may be electrically connected to one another orto an external circuit device through the wires. Hence, electric powergenerated in the solar cells may be used.

So far, the first embodiment of the invention described that thesemiconductor substrate 110 is doped with second conductive typeimpurities (for example, n-type impurities), the first semiconductorregion 120 is doped with first conductive type impurities (for example,p-type impurities) and serves as the emitter region, and the secondsemiconductor region 170 is doped with second conductive type impurities(for example, n-type impurities) and serves as the back surface fieldregion, by way of example.

However, unlike the first embodiment of the invention, second conductivetype impurities may be p-type impurities, and first conductive typeimpurities may be n-type impurities.

Further, unlike the first embodiment of the invention, the semiconductorsubstrate 110 and the first semiconductor region 120 may be doped withfirst conductive type impurities, and the second semiconductor region170 may be doped with second conductive type impurities. In thisinstance, the first semiconductor region 120 positioned at the frontsurface of the semiconductor substrate 110 may serve as a front surfacefield region, and the second semiconductor region 170 positioned at theback surface of the semiconductor substrate 110 may serve as an emitterregion.

In this instance, the second semiconductor region 170 positioned at theback surface of the semiconductor substrate 110 and the semiconductorsubstrate 110 may form a p-n junction.

In the solar cell according to the embodiment of the invention, thesecond electrode 150 may be formed of a metal foil. As shown in FIGS. 1and 3, an air gap 300 may be formed between the second electrode 150formed of the metal foil and the back surface of the semiconductorsubstrate 110.

More specifically, the second electrode 150 according to the embodimentof the invention may be formed of a thin metal foil. As shown in FIG. 2,the second electrode 150 formed of the thin metal foil may cover theentire back surface of the semiconductor substrate 110 except an edge ofthe semiconductor substrate 110.

As shown in FIGS. 1 and 3, a portion 150 a of the second electrode 150formed of the metal foil may be connected to the back surface of thesemiconductor substrate 110, and a portion 150 b of the second electrode150 may be spaced apart from the back surface of the semiconductorsubstrate 110. Thus, the air gap 300 may be formed between the secondelectrode 150 formed of the metal foil and the back surface of thesemiconductor substrate 110.

In embodiments disclosed herein, the air gap 300 indicates a space thatis between the second electrode 150 formed of the metal foil and theback surface of the semiconductor substrate 110 and is filled with air.

As described above, the embodiment of the invention may form the secondelectrode 150 using the metal foil and may form the air gap 300 betweenthe second electrode 150 formed of the metal foil and the back surfaceof the semiconductor substrate 110, thereby causing light of a longwavelength band passing through the semiconductor substrate 110 to beagain incident toward the semiconductor substrate 110. Hence, efficiencyof the solar cell according to the embodiment of the invention can befurther improved.

For example, a back reflective layer having a refractive index less thanthe semiconductor substrate 110 including a silicon material having arefractive index of about 3.4 may be positioned on the back surface ofthe semiconductor substrate 110, in order to improve a reflectance ofthe solar cell. In this instance, the back reflective layer formed ofsilicon oxide (SiOx) or silicon nitride (SiNx) may have a refractiveindex of about 1.45 to 2.0 and may relatively well reflect light of along wavelength band, thereby further improving a re-absorptance of thesemiconductor substrate 110.

However, the embodiment of the invention can maximize a light reflectionat the second electrode 150 formed of the metal foil by forming thesecond electrode 150 on the back surface of the semiconductor substrate110 using the metal foil and forming the air gap 300, that is filledwith air having an ideal refractive index of 1.0, between the secondelectrode 150 formed of the metal foil and the back surface of thesemiconductor substrate 110. Hence, the embodiment of the invention canmaximize an amount of light of a long wavelength band again incident onthe semiconductor substrate 110.

As a result, the embodiment of the invention can further improve theefficiency of the solar cell, compared to a solar cell including theback reflective layer formed of silicon oxide (SiOx) or silicon nitride(SiNx) on the back surface of the semiconductor substrate 110.

Further, when the second electrode 150 on the back surface of thesemiconductor substrate 110 is formed of the metal foil as describedabove, a manufacturing process of the solar cell can be furthersimplified. Namely, in a related art, the second electrode was formed byprinting and coating an electrode paste on the back surface of thesemiconductor substrate 110 and drying and firing the electrode paste,or was formed through an expensive plating process. However, in theembodiment of the invention, the second electrode 150 may be simplyformed by disposing the metal foil on the back surface of thesemiconductor substrate 110 and locally performing a thermal process onthe metal foil. Hence, the embodiment of the invention can greatlyreduce the manufacturing cost of the solar cell.

More specifically, the second electrode 150 according to the embodimentof the invention may be formed by disposing the metal foil on the backsurface of the semiconductor substrate 110 and performing a thermalprocess (for example, laser irradiation, infrared irradiation, hot air,and hot probe) on a local area of the metal foil to connect the metalfoil to the back surface of the semiconductor substrate 110. In theformation of the second electrode 150, a portion of the metal foil, onwhich the thermal process is not performed, may be spaced apart from theback surface of the semiconductor substrate 110 to form the air gap 300.

As shown in FIGS. 1 to 3, the second electrode 150 thus formed mayinclude a contact portion 150 a and a non-contact portion 150 b.

The contact portion 150 a indicates a portion of the metal foilcontacting the back surface of the semiconductor substrate 110. Thenon-contact portion 150 b indicates a portion of the metal foil that isspaced apart from the back surface of the semiconductor substrate 110 toform the air gap 300 between the second electrode 150 and thesemiconductor substrate 110.

The contact portion 150 a of the second electrode 150 may be in pointcontact or line contact with the back surface of the semiconductorsubstrate 110. FIG. 2 illustrates that the contact portion 150 a is inpoint contact with the back surface of the semiconductor substrate 110,by way of example.

As shown in FIG. 2, the second electrode 150 may further include anouter contact portion 150 c contacting the back surface of thesemiconductor substrate 110 at an edge of the metal foil.

The outer contact portion 150 c can prevent a material (for example,ethylene vinyl acetate (EVA)) for reducing an impact applied to a solarcell module when the solar cell module is formed from being introducedinto the air gap 300 between the semiconductor substrate 110 and themetal foil during a lamination process.

The second electrode 150 formed of the metal foil may be made of atleast one of Ag, Al, Au, W, Mo, Ni, Pt, Cu, Ti, Cr, and Fe, or an alloythereof. The non-contact portion 150 b may have a thickness T150 b of 20μm to 30 μm.

Further, a maximum thickness T300 of the air gap 300 may be less orgreater than a height of an uneven portion on the back surface of thesemiconductor substrate 110. For example, the maximum thickness T300 ofthe air gap 300 may be 1 μm to 100 μm, preferably, 3 μm to 5 μm, forexample.

The contact portion 150 a may be further recessed toward thesemiconductor substrate 110 than the non-contact portion 150 b. Morespecifically, as shown in FIGS. 1 and 3, at a back surface of the secondelectrode 150 formed of the metal foil, a formation portion of thecontact portion 150 a may be further recessed toward the semiconductorsubstrate 110 than a formation portion of the non-contact portion 150 bbecause of the local thermal processing of the metal foil.

In embodiments of the invention, the contact portion 150 a, that isfurther recessed than the non-contact portion 150 b in the secondelectrode 150 formed of the metal foil, may have, for example, a cratershape, that is recessed from an edge to the center.

Hence, as shown in FIG. 2, an outer shape of the contact portion 150 amay have a circle. However, embodiments of the invention are not limitedthereto. For example, when the contact portion 150 a is in line contactwith the back surface of the semiconductor substrate 110, an outer shapeof the contact portion 150 a may have a groove shape that is recessedwhile extending in one direction.

A recessed depth Td of the contact portion 150 a may be 15 μm to 50 μm,and a recessed width Tw of the contact portion 150 a may be 30 μm to 100μm.

As shown in FIGS. 1 and 3, when the second semiconductor region 170doped with impurities of the second conductive type is positionedbetween the semiconductor substrate 110 and the second electrode 150formed of the metal foil, the contact portion 150 a may contact thesecond semiconductor region 170, and the non-contact portion 150 b maybe spaced apart from the second semiconductor region 170 to form the airgap 300.

In this instance, an impurity doping concentration of a portion 172 ofthe second semiconductor region 170 contacting the contact portion 150 amay be higher than an impurity doping concentration of a portion 171 ofthe second semiconductor region 170 not contacting the contact portion150 a.

A lightly doped region 171 having a relatively low impurity dopingconcentration in the second semiconductor region 170 may be formed bydiffusing impurities of the second conductive type into the entire backsurface of the semiconductor substrate 110. A heavily doped region 172having a relatively high impurity doping concentration in the secondsemiconductor region 170 may be formed by performing the local thermalprocessing on a metal foil including, for example, aluminum (Al) toconnect the metal foil to the second semiconductor region 170 anddiffusing aluminum included in the metal foil into the inside of thesecond semiconductor region 170.

Hence, as shown in FIGS. 1 and 3, a thickness of the heavily dopedregion 172 of the second semiconductor region 170 may be relativelygreater than a thickness of the lightly doped region 171 of the secondsemiconductor region 170.

So far, the embodiment of the invention described that the secondelectrode 150 formed of the metal foil directly contacts the secondsemiconductor region 170, by way of example. However, the embodiment ofthe invention may be applied to a structure of a solar cell in which aseparate electrode layer is formed between the second semiconductorregion 170 and the second electrode 150.

This will be described in detail below.

FIG. 4 is a cross-sectional view of a solar cell according to a secondembodiment of the invention.

Structures and components identical or equivalent to those describedabove with reference to FIGS. 1 to 3 are omitted in FIG. 4, and adifference between them is mainly described.

As shown in FIG. 4, the solar cell according to the second embodiment ofthe invention may include a second semiconductor region 170 includingonly a lightly doped region at a back surface of a semiconductorsubstrate 110 and may further include a metal electrode layer 151connected to an entire back surface of the second semiconductor region170, unlike FIGS. 1 to 3. Even in this instance, a second electrode 150formed of a metal foil may be positioned on a back surface of the metalelectrode layer 151.

The metal electrode layer 151 may be formed by applying a metal paste tothe back surface of the second semiconductor region 170 and drying andfiring the metal paste. Hence, the metal electrode layer 151 may beconnected to the entire back surface of the second semiconductor region170.

Further, the metal electrode layer 151 may include the same material asthe second electrode 150 formed of the metal foil.

A portion 150 a (i.e., a contact portion 150 a) of the second electrode150 formed of the metal foil may contact the metal electrode layer 151,and a remaining portion 150 b (i.e., a non-contact portion 150 b) of thesecond electrode 150 may be spaced apart from the metal electrode layer151 to form an air gap 300 between the second electrode 150 and themetal electrode layer 151.

Hence, even when the metal electrode layer 151 is positioned on the backsurface of the semiconductor substrate 110 and is connected to theentire back surface of the semiconductor substrate 110, a backreflectance of the semiconductor substrate 110 can be greatly improveddue to the second electrode 150 formed of the metal foil.

Further, the embodiment of the invention may be applied to a solar cell,in which other functional layers other than the metal electrode layer151 are formed on the back surface of the semiconductor substrate 110.

This will be described in detail below.

FIGS. 5A and 5B are cross-sectional views of a solar cell according to athird embodiment of the invention.

Structures and components identical or equivalent to those describedabove with reference to FIGS. 1 to 4 are omitted in FIGS. 5A and 5B, anda difference between them is mainly described.

As shown in FIG. 5A, a back passivation layer 190 formed of a dielectricmaterial may be further disposed on a back surface of a secondsemiconductor region 170. A conductive contact electrode 152 may bepositioned to pass through the back passivation layer 190.

The back passivation layer 190 may be formed of at least one of SiOx,SiNx, SiOxNy, or AlOx and may have a thickness of 30 nm to 70 nm.

When the back passivation layer 190 is further disposed between thesecond semiconductor region 170 and a second electrode 150 formed of ametal foil as described above, a contact portion 150 a of the secondelectrode 150 formed of the metal foil may contact the secondsemiconductor region 170 through the conductive contact electrode 152passing through the back passivation layer 190.

A non-contact portion 150 b of the second electrode 150 formed of themetal foil may be spaced apart from the back passivation layer 190 toform an air gap 300 between the second electrode 150 formed of the metalfoil and the back passivation layer 190.

Thus, the embodiment of the invention may be applied to the solar cellin which the back passivation layer 190 is positioned on a back surfaceof a semiconductor substrate 110. In this instance, the second electrode150 formed of the metal foil may replace a back reflective layerinducing a back reflection and perform a function of the back reflectivelayer. Thus, efficiency of the solar cell can be further improved, andthe manufacturing cost of the solar cell may be further reduced.

However, the embodiment of the invention is not applied only to a solarcell in which the back reflective layer is removed. As shown in FIG. 5B,the embodiment of the invention may be applied to a solar cell in whicha back reflective layer 192 is disposed on a back surface of the backpassivation layer 190.

More specifically, as shown in FIG. 5B, even when the back passivationlayer 190 and the back reflective layer 192 are sequentially disposed onthe back surface of the second semiconductor region 170, the contactportion 150 a of the second electrode 150 formed of the metal foil maycontact the second semiconductor region 170 through a conductive contactelectrode 152, that passes through the back passivation layer 190 andthe back reflective layer 192 and is connected to the secondsemiconductor region 170. Further, the non-contact portion 150 b of thesecond electrode 150 may be spaced apart from the back reflective layer192 to form an air gap 300 between the second electrode 150 formed ofthe metal foil and the back reflective layer 192.

In this instance, because both the second electrode 150 formed of themetal foil and the back reflective layer 192 are included in the solarcell, a back reflectance of the solar cell can be further improved.

Further, the back reflective layer 192 may be formed of at least one ofSiOx, SiNx, SiOxNy, or SiC. A thickness of the back reflective layer 192may be greater than a thickness of the back passivation layer 190 andmay be in a range of 50 nm to 200 nm.

So far, the embodiment of the invention described that the first andsecond semiconductor regions are formed by doping impurities of thefirst and second conductive types into the semiconductor substrate 110formed of the crystalline silicon material, by way of example.

However, the embodiment of the invention may be applied to aheterojunction solar cell in which first and second semiconductorregions formed of an amorphous silicon material are deposited on asemiconductor substrate 110 formed of a crystalline silicon material.This will be described in detail below.

FIGS. 6A and 6B are cross-sectional views of a solar cell according to afourth embodiment of the invention.

Structures and components identical or equivalent to those describedabove with reference to FIGS. 1 to 5B are omitted in FIGS. 6A and 6B,and a difference between them is mainly described.

As shown in FIG. 6A, the solar cell according to the fourth embodimentof the invention may include a first semiconductor region 120 at a frontsurface of a semiconductor substrate 110 and a second semiconductorregion 170 at a back surface of the semiconductor substrate 110. Thesemiconductor substrate 110 may be formed of a crystalline siliconmaterial, and the first and second semiconductor regions 120 and 170 maybe formed of an amorphous silicon material.

A first electrode 140 connected to the first semiconductor region 120may include a first transparent electrode layer 141 and a grid electrode142. The first transparent electrode layer 141 may be positioned on anentire front surface of the first semiconductor region 120 and may beformed of transparent conductive oxide (TCO). The grid electrode 142 maybe positioned on a front surface of the first transparent electrodelayer 141 and connected to the first transparent electrode layer 141.The first transparent electrode layer 141 has the conductivity and thelight transmission and thus can serve as an anti-reflection layer.

A second transparent electrode layer 153 formed of transparentconductive oxide may be positioned on a back surface of the secondsemiconductor region 170 formed of the amorphous silicon material. Asecond electrode 150 formed of a metal foil may be positioned on a backsurface of the second transparent electrode layer 153.

A contact portion 150 a of the second electrode 150 formed of the metalfoil may directly contact the second transparent electrode layer 153. Anon-contact portion 150 b of the second electrode 150 formed of themetal foil may be spaced apart from the second transparent electrodelayer 153 to form an air gap 300.

FIG. 6A illustrates that the contact portion 150 a of the secondelectrode 150 formed of the metal foil directly contacts the secondtransparent electrode layer 153, by way of example. Unlike FIG. 6A, asshown in FIG. 6B, a conductive contact electrode 152 may be positionedon the back surface of the second transparent electrode layer 153, andthe contact portion 150 a may contact the second transparent electrodelayer 153 through the conductive contact electrode 152.

When the second electrode 150 formed of the metal foil is applied tosuch a heterojunction solar cell, the manufacturing cost of the secondelectrode 150 can be further reduced compared to when the secondelectrode 150 is formed using an electrode paste. In addition, amanufacturing process of the solar cell can be simplified.

Because a back reflection is generated at a boundary between the secondtransparent electrode layer 153 and the air gap 300 and at a boundarybetween the air gap 300 and the second electrode 150 formed of the metalfoil due to the air gap 300, efficiency of the solar cell can be furtherimproved.

In general, a heterojunction solar cell using amorphous silicon uses ametal paste of low temperature firing, and a sheet resistance of thesecond transparent electrode layer 153 greatly affects a serialresistance of the component. In the embodiments of the invention,because the second electrode 150 formed of the metal foil is formedthroughout the entire back surface of the semiconductor substrate 110,the embodiments of the invention are advantageous to a reduction in aserial resistance.

So far, the first to fourth embodiments of the invention described aconventional solar cell, in which the first electrode 140 is positionedon the front surface of the semiconductor substrate 110 and the secondelectrode 150 is positioned on the back surface of the semiconductorsubstrate 110, by way of example. However, embodiments of the inventionare not limited thereto. For example, embodiments of the invention maybe applied to a back contact solar cell, in which both first and secondelectrodes are positioned on a back surface of a semiconductorsubstrate. This will be described in detail below.

FIGS. 7 to 9B illustrate a solar cell according to a fifth embodiment ofthe invention. More specifically, FIG. 7 is a partial perspective viewof the solar cell according to the fifth embodiment of the invention;FIG. 8 is a cross-sectional view of the solar cell according to thefifth embodiment of the invention; FIG. 9A illustrates an example of aback pattern of the solar cell according to the fifth embodiment of theinvention; and FIG. 9B illustrates another example of the back patternof the solar cell according to the fifth embodiment of the invention.

As shown in FIGS. 7 and 8, the solar cell according to the fifthembodiment of the invention may include a semiconductor substrate 110,an anti-reflection layer 130, a tunnel layer 180, a plurality of firstsemiconductor regions 120′, a plurality of second semiconductor regions170′, a plurality of intrinsic semiconductor regions 200, a plurality offirst electrodes 140′, a plurality of second electrodes 150′, and a backpassivation layer 190.

Since the semiconductor substrate 110 and the anti-reflection layer 130according to the fifth embodiment of the invention are substantially thesame as those described in the first to fourth embodiments of theinvention, a further description may be briefly made or may be entirelyomitted. A difference between the fifth embodiment and the first tofourth embodiments of the invention is mainly described.

The fifth embodiment of the invention is described based on an examplein which a semiconductor substrate 110 is doped with impurities of asecond conductive type.

In the fifth embodiment of the invention, as shown in FIGS. 7 and 8, thetunnel layer 180 may be disposed on an entire back surface of thesemiconductor substrate 110 and may directly contact the back surface ofthe semiconductor substrate 110.

The tunnel layer 180 may pass through carriers produced in thesemiconductor substrate 110 and may perform a passivation function withrespect to the back surface of the semiconductor substrate 110. To thisend, a thickness of the tunnel layer 180 may be 0.5 nm to 5 nm.

The tunnel layer 180 may be formed of a dielectric material includingsilicon carbide (SiCx) or silicon oxide (SiOx) having strong durabilityat a high temperature equal to or higher than 600° C. Other materialsmay be used.

The plurality of first semiconductor regions 120′ may be positioned atthe back surface of the semiconductor substrate 110 and may be formed ofpolycrystalline silicon material doped with impurities of a firstconductive type. Thus, each first semiconductor region 120′ may serve asan emitter region.

Each first semiconductor region 120′ may directly contact a portion of aback surface of the tunnel layer 180 on the back surface of thesemiconductor substrate 110. The plurality of first semiconductorregions 120′ may be disposed to extend in a first direction x and mayform a p-n junction together with the semiconductor substrate 110 withthe tunnel layer 180 interposed between them.

The plurality of second semiconductor regions 170′ may be positioned atthe back surface of the semiconductor substrate 110 and may be formed ofpolycrystalline silicon material that is more heavily doped than thesemiconductor substrate 110 with impurities of the second conductivetype. Thus, each second semiconductor region 170′ may serve as a backsurface field region.

Each second semiconductor region 170′ may directly contact a portion(spaced apart from each first semiconductor region 120′) of the backsurface of the tunnel layer 180 on the back surface of the semiconductorsubstrate 110. The plurality of second semiconductor regions 170′ may bedisposed to extend in the first direction x in parallel with the firstsemiconductor regions 120′.

FIGS. 7 and 8 illustrate that the first semiconductor regions 120′ andthe second semiconductor regions 170′ are formed on the back surface ofthe tunnel layer 180 using the polycrystalline silicon material, by wayof example. However, if the tunnel layer 180 is omitted unlike FIGS. 7and 8, the first semiconductor regions 120′ and the second semiconductorregions 170′ may be doped by diffusing impurities into the back surfaceof the semiconductor substrate 110. In this instance, the firstsemiconductor regions 120′ and the second semiconductor regions 170′ maybe formed of the same material (for example, a silicon material) as thesemiconductor substrate 110.

Each of the plurality of intrinsic semiconductor layers 200 may beformed on the back surface of the tunnel layer 180 exposed between thefirst semiconductor region 120′ and the second semiconductor region170′. The intrinsic semiconductor layers 200 may be formed of anintrinsic polycrystalline silicon material, that is not doped withimpurities of the first conductive type or impurities of the secondconductive type, unlike the first semiconductor regions 120′ and thesecond semiconductor regions 170′.

Further, as shown in FIGS. 7 and 8, the intrinsic semiconductor layer200 may be configured such that both sides directly contact the side ofthe first semiconductor region 120′ and the side of the secondsemiconductor region 170′, respectively.

The intrinsic semiconductor layer 200 is not an essential component andthus may be omitted if desired or necessary. If the intrinsicsemiconductor layer 200 is omitted, the first semiconductor region 120′and the second semiconductor region 170′ may be spaced apart from eachother, or may be directly connected to each other.

The plurality of first electrodes 140′ may be positioned on the backsurface of the semiconductor substrate 110 and may be connected to thefirst semiconductor regions 120′. As shown in FIGS. 9A and 9B, the firstelectrodes 140′ may be disposed to extend in the first direction x. Thefirst electrodes 140′ may collect carriers moving to the firstsemiconductor regions 120′.

The plurality of second electrodes 150′ may be positioned on the backsurface of the semiconductor substrate 110 and may be connected to thesecond semiconductor regions 170′. As shown in FIGS. 9A and 9B, thesecond electrodes 150′ may be disposed to extend in the first directionx in parallel with the first electrodes 140′. The second electrodes 150′may collect carriers moving to the second semiconductor region 170′.

The first and second electrodes 140′ and 150′ may extend in the firstdirection x and may be alternately disposed in a second direction y.

The back passivation layer 190 may remove a defect resulting from adangling bond formed at a back surface of a polycrystalline siliconlayer formed at the first semiconductor region 120′, the secondsemiconductor region 170′, and the intrinsic semiconductor layer 200.Thus, the back passivation layer 190 can reduce or prevent carriersproduced in the semiconductor substrate 110 from being recombined anddisappeared by the dangling bond.

However, the back passivation layer 190 is not an essential componentand thus may be omitted if desired or necessary.

In the solar cell having the above-described structure according to theembodiment of the invention, holes collected by the first electrodes140′ and electrons collected by the second electrodes 150′ may be usedas electric power of an external device through an external circuitdevice.

The solar cell applied to a solar cell module according to theembodiment of the invention is not limited to FIGS. 7 and 8. Thecomponents of the solar cell may be variously changed, except that thefirst and second electrodes 140′ and 150′ included in the solar cell areformed on the back surface of the semiconductor substrate 110.

For example, the solar cell module according to the embodiment of theinvention may use a metal wrap through (MWT) solar cell, that isconfigured such that a portion of the first electrode 140′ and the firstsemiconductor region 120′ are positioned on the front surface of thesemiconductor substrate 110, and the portion of the first electrode 140′is connected to a remaining portion of the first electrode 140′ formedon the back surface of the semiconductor substrate 110 through a hole ofthe semiconductor substrate 110.

As shown in FIGS. 7 and 8, each of the first electrode 140′ and thesecond electrode 150′ according to the fifth embodiment of the inventionmay be formed of a metal foil covering the first semiconductor region120′ and the second semiconductor region 170′. An air gap 300 may beformed between the first and second electrodes 140′ and 150′ formed ofthe metal foil and the first and second semiconductor regions 120′ and170′.

In the solar cell in which the first and second electrodes 140′ and 150′are formed of the metal foil and the air gap 300 is formed between thefirst and second electrodes 140′ and 150′ formed of the metal foil andthe first and second semiconductor regions 120′ and 170′, a backreflectance of the semiconductor substrate 110 can be further improved,and the manufacturing cost of the solar cell can be reduced bysimplifying a method for forming the first and second electrodes 140′and 150′.

As shown in FIGS. 7 and 8, the first electrode 140′ formed of the metalfoil may include a first contact portion 140′a contacting a back surfaceof the first semiconductor region 120′ and a first non-contact portion140′b that is spaced apart from the first semiconductor region 120′ toform the air gap 300 between the first non-contact portion 140′b and thefirst semiconductor region 120′.

Further, the second electrode 150′ formed of the metal foil may includea second contact portion 150′a contacting a back surface of the secondsemiconductor region 170′ and a second non-contact portion 150′b that isspaced apart from the second semiconductor region 170′ to form the airgap 300 between the second non-contact portion 150′b and the secondsemiconductor region 170′.

The first and second electrodes 140′ and 150′ formed of the metal foilmay be made of at least one of Ag, Al, Au, W, Mo, Ni, Pt, Cu, Ti, Cr,and Fe, or an alloy thereof. A thickness of each of the first and secondnon-contact portions 140′b and 150′b may be 20 μm to 30 μm.

The first and second contact portions 140′a and 150′a may be furtherrecessed toward the semiconductor substrate 110 than the first andsecond non-contact portions 140′b and 150′b.

More specifically, as shown in FIGS. 7 and 8, a portion of a backsurface of each of the first and second electrodes 140′ and 150′ formedof the metal foil, on which the first and second contact portions 140′aand 150′a are positioned, may be further recessed toward thesemiconductor substrate 110 than a portion, on which the first andsecond non-contact portions 140′b and 150′b are positioned, due to aninfluence of the local thermal processing of the metal foil.

In each of the first and second electrodes 140′ and 150′ formed of themetal foil, the first contact portion 140′a may be in point contact orline contact with the back surface of the first semiconductor region120′, and the second contact portion 150′a may be in point contact orline contact with the back surface of the second semiconductor region170′.

For example, as shown in FIG. 9A, when the first and second electrodes140′ and 150′ formed of the metal foil are extended in the firstdirection x and the first and second contact portions 140′a and 150′aare in point contact with the first and second semiconductor regions120′ and 170′, respectively, a pair of first contact portions 140′a maybe formed at both ends of the first electrode 140′ in the seconddirection y, and a pair of second contact portions 150′a may be formedat both ends of the second electrode 150′ in the second direction y.Further, the pairs of the first contact portions 140′a may be spacedapart from each other in the first direction x, and a plurality of pairsof the second contact portions 150′a may be spaced apart from oneanother in the first direction x.

Alternatively, as shown in FIG. 9B, unlike the point contact, when thefirst and second electrodes 140′ and 150′ formed of the metal foil areextended in the first direction x and the first and second contactportions 140′a and 150′a are in line contact with the first and secondsemiconductor regions 120′ and 170′, respectively, the first and secondcontact portions 140′a and 150′a may be formed in a line shape alongedges of the first and second electrodes 140′ and 150′, respectively.

The embodiment of the invention can further improve the back reflectanceof the semiconductor substrate 110 by forming the electrodes using themetal foil and forming the air gap 300 between the metal foil and thesemiconductor substrate 110, and can also reduce the manufacturing costof the solar cell by simplifying the forming method of the electrodes.

So far, the solar cells according to various embodiments of theinvention were described. Hereinafter, a cross section of a solar cellmodule manufactured by modularizing solar cells is briefly described.

FIG. 10 illustrates an example of a cross-section of a solar cell moduleto which a solar cell according to an embodiment of the invention isapplied.

More specifically, FIG. 10 illustrates a modularized cross section ofthe solar cells according to the first embodiment of the inventiondescribed with reference to FIGS. 1 to 3, by way of example. In FIG. 10,interconnectors connecting a plurality of solar cells in series areomitted for convenience of explanation.

As shown in FIG. 10, a solar cell module to which a solar cell accordingto an embodiment of the invention is applied, may include a fronttransparent substrate FG, a back sheet BS, a first encapsulant EC1, asecond encapsulant EC2, and a solar cell.

The front transparent substrate FG may be positioned on a front surfaceof the solar cell and may be formed of a material, for example, atempered glass having a high transmittance and an excellent damageprevention function.

The first encapsulant EC1 may be positioned between the fronttransparent substrate FG and the solar cell. The second encapsulant EC2may be positioned between the solar cell and the back sheet BSpositioned at a back surface of the solar cell.

The first encapsulant EC1 and the second encapsulant EC2 may be formedof a material for preventing a metal corrosion resulting from moisturepenetration and protecting the solar cell module from an impact.

A lamination process may be performed on the first encapsulant EC1 andthe second encapsulant EC2, that are respectively disposed on a frontsurface and the back surface of the solar cell, to form one body of thefirst and second encapsulants EC1 and EC2 and the solar cell.

The first encapsulant EC1 and the second encapsulant EC2 may be formedof ethylene vinyl acetate (EVA), etc.

The back sheet BS may be positioned on a back surface of the secondencapsulant EC2 and can prevent moisture and oxygen from penetratinginto a back surface of the solar cell module.

The back sheet BS may be formed as a thin sheet made of an insulatingmaterial, such as fluoropolymer/polyester/fluoropolymer (FP/PE/FP).Insulating sheets made of other insulating materials may be used in theback sheet BS.

In the cross-section of the solar cell module shown in FIG. 10, thesolar cell, the first encapsulant EC1, and the second encapsulant EC2may be formed as one body between the front transparent substrate FG andthe back sheet BS by the lamination process.

In this instance, because a second electrode 150 formed of a metal foilcovers an entire back surface of a semiconductor substrate 110, thesecond encapsulant EC2 does not penetrate into an air gap 300 betweenthe second electrode 150 formed of the metal foil and the back surfaceof the semiconductor substrate 110. Further, after the laminationprocess, the air gap 300 may exist in the complete solar cell module.

Hence, efficiency of the solar cell module including the solar cellaccording to the embodiment of the invention can be improved by the airgap 300 provided in the back surface of the semiconductor substrate 110.

FIG. 10 illustrates the solar cell according to the first embodiment ofthe invention by way of example. However, embodiments of the inventionare not limited thereto, and may be equally applied to the second tofifth embodiments as well as the first embodiment. Hence, in a solarcell module to which the solar cells according to the second to fifthembodiments are applied, the air gap between the electrode formed of themetal foil and the back surface of the semiconductor substrate can existin the complete solar cell module after the lamination process byapplying the electrode formed of the metal foil to the solar cellmodule. Further, efficiency of the solar cell module can be improved bythe air gap provided in the back surface of the semiconductor substrate.

So far, the embodiments of the invention described only the structure ofthe electrode formed of the metal foil and the air gap. Hereinafter, amethod of manufacturing the solar cell according to the embodiments ofthe invention is described.

FIG. 11 is a flow chart illustrating a method of manufacturing the solarcell according to the first embodiment of the invention.

The method of manufacturing the solar cell according to the firstembodiment of the invention illustrated in FIG. 11 may be applied tomanufacture the solar cells according to the second to fourthembodiments of the invention that describe a conventional solar cell byway of example.

The method of manufacturing the solar cell according to the firstembodiment of the invention may include a semiconductor substratepreparing operation S1, a first electrode forming operation S2, and asecond electrode forming operation S3.

FIG. 11 illustrates that the first electrode forming operation S2 andthe second electrode forming operation S3 are sequentially performed, byway of example. However, embodiments of the invention are not limitedthereto. For example, the order of the first electrode forming operationS2 and the second electrode forming operation S3 may be reversed.

A semiconductor substrate 110 prepared in the semiconductor substratepreparing operation S1 may include a first semiconductor region 120,that is doped with impurities of a first conductive type at a frontsurface of the semiconductor substrate 110, and a second semiconductorregion 170, that is doped with impurities of a second conductive typeopposite the first conductive type at a back surface of thesemiconductor substrate 110. In another embodiment, the semiconductorsubstrate 110 not including the second semiconductor region 170 may beused.

In the first electrode forming operation S2, a first electrode 140connected to the first semiconductor region 120 may be formed asdescribed above with reference to FIGS. 1 to 6B.

The second electrode forming operation S3 may form a second electrode150 connected to the back surface of the semiconductor substrate 110using a metal foil, and at the same time form an air gap 300 between themetal foil and the back surface of the semiconductor substrate 110.

Hence, as described above with reference to FIGS. 1 to 6B, the secondelectrode 150 formed of the metal foil may include a contact portion 150a contacting the back surface of the semiconductor substrate 110 and anon-contact portion 150 b that is spaced apart from the back surface ofthe semiconductor substrate 110 to form the air gap 300 between thesemiconductor substrate 110 and the second electrode 150.

For example, when the second semiconductor region 170 is formed at theback surface of the semiconductor substrate 110, the second electrodeforming operation S3 may form the second electrode 150 connected to thesecond semiconductor region 170 using a metal foil, and at the same timeform an air gap 300 between the metal foil and the back surface of thesemiconductor substrate 110.

In this instance, a contact portion 150 a of the second electrode 150formed of the metal foil may contact the second semiconductor region170, and a non-contact portion 150 b of the second electrode 150 formedof the metal foil may be spaced apart from the back surface of thesemiconductor substrate 110 to form the air gap 300 between thesemiconductor substrate 110 and the second electrode 150.

In the second electrode forming operation S3, as shown in FIGS. 2 and 3,a thermal process may be performed on the contact portion 150 a of anentire portion of the metal foil to bring the contact portion 150 a intocontact with the back surface of the semiconductor substrate 110. Inthis instance, the thermal process may be locally performed on thecontact portion 150 a of the metal foil covering the entire back surfaceof the semiconductor substrate 110.

In the second electrode forming operation S3, the thermal process may beperformed using at least one of laser irradiation, infrared irradiation,hot air, or hot probe.

For example, when the thermal process is performed using the laserirradiation, a laser may be selectively irradiated onto the contactportion 150 a of the metal foil to bring the metal foil into contactwith the second semiconductor region 170. In this instance, a portion ofthe metal foil, onto which the laser is not irradiated, may be formed asthe non-contact portion 150 b, and the air gap 300 may be formed betweenthe non-contact portion 150 b of the metal foil and the back surface ofthe semiconductor substrate 110.

In embodiments of the invention, the laser may use Nd:YAG laser having awavelength of about 1,064 nm and may be irradiated using a pulseirradiation method.

In embodiments of the invention, an intensity of the laser may beselected between 6 mJ/cm² to 500 mJ/cm² depending on a thickness and amaterial of the metal foil.

When the intensity of the laser is equal to or greater than 6 mJ/cm², abad contact of the metal foil can be prevented or reduced. Further, whenthe intensity of the laser is equal to or less than 500 mJ/cm² or thelaser is irradiated using not a continuous wave irradiation method but apulse irradiation method, the metal foil can be prevented or reducedfrom being removed by the burn of the metal foil, or a damage of thecontact portion 150 a of the metal foil can be prevented or reduced.

FIG. 11 illustrated and described the method of manufacturing theconventional solar cell, in which the first electrode 140 is positionedon the front surface of the semiconductor substrate 110 and the secondelectrode 150 is positioned on the back surface of the semiconductorsubstrate 110. Hereinafter, a method of manufacturing a back contactsolar cell, in which both first and second electrodes are positioned ona back surface of a semiconductor substrate 110, is described.

FIG. 12 is a flow chart illustrating a method of manufacturing the solarcell according to the second embodiment of the invention.

The method of manufacturing the solar cell according to the secondembodiment of the invention illustrated in FIG. 12 may be applied tomanufacture the solar cell according to the fifth embodiment of theinvention that describes a back contact solar cell by way of example.

The method of manufacturing the solar cell according to the secondembodiment of the invention may include a semiconductor substratepreparing operation S1, a first electrode forming operation S2′, and asecond electrode forming operation S3′.

In embodiments of the invention, the order of the first electrodeforming operation S2′ and the second electrode forming operation S3′ maybe reversed.

A semiconductor substrate 110 prepared in the semiconductor substratepreparing operation S1 may include a first semiconductor region 120′ anda second semiconductor region 170′ that extend in the first direction xat a back surface of the semiconductor substrate 110 and are spacedapart from each other as shown in FIGS. 7 and 8.

The first electrode forming operation S2′ may be performed in a statewhere the semiconductor substrate 110 including the first and secondsemiconductor regions 120′ and 170′ at the back surface of thesemiconductor substrate 110 is prepared.

The first electrode forming operation S2′ may form a first electrode140′ connected to the first semiconductor region 120′ using a metalfoil, and at the same time form an air gap 300 between the metal foiland the back surface of the semiconductor substrate 110.

As described above with reference to FIGS. 7 to 9B, the first electrode140′ formed of the metal foil in the first electrode forming operationS2′ may include a first contact portion 140′a contacting a back surfaceof the first semiconductor region 120′ and a first non-contact portion140′b that is spaced apart from the first semiconductor region 120′ toform the air gap 300 between the first semiconductor region 120′ and thefirst electrode 140′.

In the first electrode forming operation S2′, a thermal process may beperformed on the first contact portion 140′a of the metal foil in astate where the metal foil is disposed to entirely cover the firstsemiconductor region 120′.

In this instance, since the thermal process illustrated in FIG. 12 issubstantially the same as the thermal process used in the method ofmanufacturing the solar cell according to the first embodiment of theinvention illustrated in FIG. 11, a further description may be brieflymade or may be entirely omitted.

Next, the second electrode forming operation S3′ may form a secondelectrode 150′ connected to the second semiconductor region 170′ using ametal foil, and at the same time form an air gap 300 between the metalfoil and the back surface of the semiconductor substrate 110.

As described above with reference to FIGS. 7 to 9B, the second electrode150′ formed of the metal foil in the second electrode forming operationS3′ may include a second contact portion 150′a contacting a back surfaceof the second semiconductor region 170′ and a second non-contact portion150′b that is spaced apart from the second semiconductor region 170′ toform the air gap 300 between the second semiconductor region 170′ andthe second electrode 150′.

In the second electrode forming operation S3′, a thermal process may beperformed on the second contact portion 150′a of the metal foil in astate where the metal foil is disposed to entirely cover the secondsemiconductor region 170′.

In this instance, since the thermal process illustrated in FIG. 12 issubstantially the same as the thermal process used in the method ofmanufacturing the solar cell according to the first embodiment of theinvention illustrated in FIG. 11, a further description may be brieflymade or may be entirely omitted.

Although embodiments have been described with reference to a number ofillustrative embodiments thereof, it should be understood that numerousother modifications and embodiments can be devised by those skilled inthe art that will fall within the scope of the principles of thisdisclosure. More particularly, various variations and modifications arepossible in the component parts and/or arrangements of the subjectcombination arrangement within the scope of the disclosure, the drawingsand the appended claims. In addition to variations and modifications inthe component parts and/or arrangements, alternative uses will also beapparent to those skilled in the art.

What is claimed is:
 1. A solar cell comprising: a semiconductorsubstrate; a first semiconductor region positioned at a front surface ora back surface of the semiconductor substrate and doped with impuritiesof a first conductive type; a first electrode on the first semiconductorregion; a second electrode on the back surface of the semiconductorsubstrate; and a second semiconductor region positioned between thesemiconductor substrate and the second electrode and doped withimpurities of a second conductive type opposite the first conductivetype, the second semiconductor region having a plurality ofconcave-convex portions, wherein the second electrode is formed of ametal foil, and an air gap is formed between the second electrode formedof the metal foil and a back surface of the second semiconductor region,wherein the second electrode formed of the metal foil includes: acontact portion on the back surface of the second semiconductor region;and a non-contact portion that is spaced apart from the back surface ofthe second semiconductor region to form the air gap between the secondelectrode and the back surface of the second semiconductor region,wherein the contact portion of the second electrode has a protrusionthat projects toward a concave portion of the plurality ofconcave-convex portions of the second semiconductor region and isconnected to the second semiconductor region, and wherein thenon-contact portion of the second electrode is spaced apart from thesecond semiconductor region by the air gap.
 2. The solar cell of claim1, wherein the second semiconductor region contacts the contact portionof the second electrode, and wherein an impurity doping concentration ofa portion of the second semiconductor region contacting the contactportion of the second electrode is higher than an impurity dopingconcentration of a portion of the second semiconductor region notcontacting the contact portion of the second electrode.
 3. The solarcell of claim 1, further comprising a metal electrode layer positionedbetween the second semiconductor region and the second electrode formedof the metal foil, and the metal electrode layer being entirelyconnected to the semiconductor substrate and having a plurality ofconcave-convex portions, wherein the contact portion of the secondelectrode contacts the metal electrode layer, and the non-contactportion of the second electrode is spaced apart from the metal electrodelayer by the air gap.
 4. The solar cell of claim 1, further comprising aback passivation layer positioned between the second semiconductorregion and the second electrode formed of the metal foil, the backpassivation layer being formed of a dielectric material and having aplurality of concave-convex portions, wherein the contact portion of thesecond electrode passes through the back passivation layer and contactsthe second semiconductor region, and wherein the non-contact portion ofthe second electrode is spaced apart from the back passivation layer bythe air gap.
 5. The solar cell of claim 4, further comprising aconductive contact electrode passing through the back passivation layerand further positioned between the contact portion of the secondelectrode and the second semiconductor region.
 6. The solar cell ofclaim 1, wherein the semiconductor substrate is formed of a crystallinesilicon material, wherein the second semiconductor region is formed ofan amorphous silicon material, wherein a transparent electrode layer ispositioned at the back surface of the second semiconductor region formedof the amorphous silicon material and has a plurality of concave-convexportions, wherein the contact portion of the second electrode contactsthe transparent electrode layer, and wherein the non-contact portion ofthe second electrode is spaced apart from the transparent electrodelayer by the air gap.
 7. The solar cell of claim 6, further comprising aconductive contact electrode positioned between the contact portion ofthe second electrode and the transparent electrode layer.
 8. The solarcell of claim 1, wherein the metal foil of the second electrode directlyincludes a planar portion that corresponds to the plurality ofconcave-convex portions of the second semiconductor region.